76193685
Jan 16, 2001
Feb 25, 2003
Chemical anti-reflective coatings, speciality polymers and other chemicals for use in the microelectronics industry
ChemicalsWafer processing equipment, namely, dispense systems, namely, auto dispensers and pump dispenser, CVD systems, comprised of a sublimation oven, a pyrolysis oven, a deposition chamber, and a vacuum-based processor, and metrology systems, namely, instruments for contact angle measurement, for use in photolithographic processes
Electrical and Scientific Apparatus