BOC EDWARDS

CHEMICAL BLENDING APPARATUS AND DELIVERY SYSTEM AND POINT OF USE CHEMICAL BLENDING APPARATUS AND DELIVERY SYSTEM, NAMELY, MACHINES USED TO BLEND CHEMICAL MIXTURES AND DELIVER THEM TO TOOLS USED TO MANUFACTURE SEMICONDUCTORS; APPARATUS AND SYSTEM FOR BLENDING AND DISTRIBUTION OF CHEMICAL MECHANICAL POLISHING SLURRIES, NAMELY, MACHINES TO BLEND CHEMICAL MIXTURES USED FOR POLISHING SEMICONDUCTOR WAFERS AND INTEGRATED CIRCUITS; ON LINE PARTICLE SIZE ANALYTICAL DEVICE FOR USE IN CHEMICAL MECHANICAL POLISHING SYSTEM, NAMELY, MACHINES FOR MONITORING AND MEASURING CHEMICAL MECHANICAL POLISHING SLURRY CONDITIONS FOR SEMICONDUCTOR MANUFACTURING PROCESSES

SPECTROGRAPHS; MASS SPECTROMETERS; LEAK DETECTORS FOR USE IN SEMICONDUCTOR PRODUCTION PROCESSES; COMPUTER SOFTWARE FOR MONITORING SYSTEM STATUS AND PROVIDING DATA RELATING TO VACUUM, EXHAUST ABATEMENT, CHEMICAL USE AND GAS USE, RELATING TO THE MANUFACTURE OF SEMICONDUCTORS AND INTEGRATED CIRCUITS; TEMPERATURE CONTROL UNITS FOR SEMICONDUCTOR MANUFACTURING PROCESSES, NAMELY CHILLERS FOR PRODUCING CONSTANT TEMPERATURES UNDER CONDITIONS OF VARYING HEAT LOADS IN SEMICONDUCTOR MANUFACTURING PROCESSES