BOC EDWARDS

vacuum machines and parts and fittings therefor used as a component of vacuum pumps used for industrial or research purposes; vacuum chambers; vacuum pumps and parts and fittings therefor; pumps used for creating a vacuum for research or industrial purposes, namely, mechanical pumps, diffusion pumps, turbomolecular pumps, cryogenic pumps, adsorption and getter pumps; abatement machines used for removal of exhaust during semiconductor manufacturing processes; machines used for separating and cleaning gas of liquid exhaust fluids during semiconductor manufacturing processes; integrated vacuum and abatement machines used for separating and cleaning gas of liquid exhaust fluids and removal of exhaust during semiconductor manufacturing process