77273799
Sep 7, 2007
May 20, 2008
Semiconductor manufacturing machines, semiconductor wafer handling systems in the nature of industrial robots and operating software sold as an integral component thereof
MachineryComputer software for operating each of semiconductor wafer handling systems, semiconductor manufacturing machines, robotic systems and process control systems, controller, namely, computer hardware and operating software sold as a unit for controlling operation of robotic and process control systems
Electrical and Scientific Apparatus