Mark Identification

BEAM PROFILE REFLECTOMETRY

Serial Number

75342802

Filing Date

Aug 18, 1997

Registration Date

Dec 25, 2001

Trademark by

KLA CORPORATION

Active Trademark

Classification Information

OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN ORDER TO DETERMINE THE CHARACTERISTICS THEREOF

Electrical and Scientific Apparatus