Mark Identification

BEAM PROFILE ELLIPSOMETRY

Serial Number

75344868

Filing Date

Aug 18, 1997

Registration Date

Dec 18, 2001

Trademark by

KLA CORPORATION

Active Trademark

Classification Information

OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN ORDER TO DETERMINE THE CHARACTERISTICS THEREOF

Electrical and Scientific Apparatus