BAY AUTOMATION

semiconductor fabrication facility equipment, namely, wafer stockers for storing semiconductor wafer cassettes between processing steps, reticle stockers for storing recticles used in semiconductor wafer processing; wafer cassette transport system comprising a monorail train having a plurality of platforms or cards for transporting semi-conductor wafer cassettes from storage cabinets to multiple processing areas and back throughout a semi-conductor wafer processing plant and wafer cassette manipulating system control software