75205223
Nov 27, 1996
Feb 16, 1999
chemical compositions, namely, metals, metal and alloy plating compositions, and [ gases for use in the manufacturing of thin films, namely, gases for reactive coating processes, for cooling processes, for transporting media, for coatings in a vacuum chamber, for etching ]
Chemicalsvacuum deposition machines for coating [ data storage media, electronic components, displays,] tools, precision components, transparent substrates to change their optical qualities, metal parts to improve wear resistance, and parts therefor; components for vacuum pumps and vacuum valves, namely, vacuum fittings, vacuum feedthroughs and vacuum valves
Machinery[ total pressure gauges, measuring and control apparatuses for vacuum systems; partial pressure measuring gauges for vacuum machines; gas analysis apparatus for determining the gas composition in vacuum machines at low high pressures; leak detectors for detecting leaks in vacuum and in air tight containers; chip carrier cleaners for surface cleaning of electronic components,] ultrasonic cleaners for substrates to be coated in a vacuum system; sputtering cathodes; sputtering targets, sputtering shields, [ sputtering masks, evaporation filaments, evaporation boats, ceramic crucibles, and quartz crystals ]
Electrical and Scientific Apparatus