78539026
Dec 28, 2004
Apr 17, 2007
Inspection modules for use with inspection equipment and devices, namely, equipment and devices that sense and/or capture images of semiconductor and electronic related components including semiconductor wafers, semiconductor die, packaged integrated circuits, printed circuit boards, liquid crystal displays, electronic displays, and disk storage media, and automatically inspect these images for information such as defects, coordinate or position determination, identification, and/or presence or absence of something thereon
Electrical and Scientific Apparatus