AXION

metrology system comprised of computer software and computer hardware for testing and characterizing physical properties of semiconductors and integrated circuits, namely, critical dimension and shape; instruments for testing, inspecting, and characterizing physical properties of semiconductors and integrated circuits; computer hardware and software used for testing, inspecting, and characterizing physical properties of semiconductors and integrated circuits; computer hardware and software used for monitoring and controlling semiconductor manufacturing processes; computer hardware and software used for providing feedback about device parameters to semiconductor and integrated circuit manufacturers