75471200
Apr 21, 1998
Jan 25, 2000
Inspection equipment and devices, namely, equipment and devices that sense and/or capture images of semiconductor and electronic related components including semiconductor wafers, semiconductor die, packaged integrated circuits, printed circuit boards, liquid crystal displays, electronic displays, and disk storage media, and automatically inspect these images for information such as defects, coordinate or position determination, identification, and/or presence or absence of something thereon
Electrical and Scientific Apparatus