ATOMFAB

Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching with automated handling