ATMOS

Machines for the thermal treatment of substrates, semiconductor substrates, silicon discs and wafers for semiconductor chip manufacturing; Machines for manufacturing semiconductor film or layer structures, namely, rapid thermal processing machines and epitaxial-reactors

Apparatuses, devices, machines and systems consisting thereof for the thermal treatment of substrates, semiconductor substrates, silicon discs and wafers for the production of semiconductor chips, namely, rapid steam heating apparatuses, devices, machines and systems consisting thereof and rapid heating apparatuses, devices, machines and systems consisting thereof; rapid heating apparatuses for the treatment and production of semiconductors, namely, halogen lamps and arc lamps