ASYST

Standard Mechanical Interface (SMIF) systems for the manufacture, transfer and storage of semiconductor wafers, reticles, and magnetic media, comprised of sealed containers, processing equipment enclosures with engineered air and gas flows, fully automated robotic and human guided transfer equipment used in the manufacture, storage, transport and protection of semiconductor wafers, reticles and magnetic media in a cleanroom and mating ports used in the transfer of semiconductor wafers, reticles, and magnetic media between a minienvironment and a sealed container

electromechanical humidity, temperature and contamination controls for use in the manufacture, transfer and storage semiconductor wafers, reticles and magnetic media; computer hardware and software programs for managing, tracking, controlling and routing the processing and manufacturing of semiconductor wafers, reticles and magnetic media

user and instruction manuals for use with equipment used in the manufacturing, storage or transfer of semiconductor wafers, reticles and magnetic media