88852248
Mar 30, 2020
Mar 16, 2021
Active Trademark
Electronic instruments for use in inspection and measurement of industrial components, namely, an automated substrate metrology device comprised of a robotic handler, automated positioning system, and optics system, all for use in determining the critical dimensions, profiles, film thickness, and composition of patterned and un-patterned films and structures used in the fabrication of integrated circuits and semiconductors
Electrical and Scientific Apparatus