Classification Information
Sensors and probes and parts thereof for non-optical microscopes and near-field optical microscopes; micromechanical and microelectrical instruments and apparatus for surface and equipment characteristics detection; sensors and probes and parts thereof for high-power scanning microscopy, scanning probe microscopy and scanning electron microscopy; sensors comprising micromechanical slides and membranes; scanning instruments and sensors and parts thereof for determining and measuring surfaces and equipment characteristics
Electrical and Scientific Apparatus