75131954
Jul 10, 1996
Apr 21, 1998
advanced plasma and vacuum systems comprised of power supplies, computer controls, shutter solenoids, flow controllers, pressure controllers, rate monitors, vacuum pumps, valves, gauges, switches, vacuum chambers, carousels, system interlocks, and deposition machines for applying coatings, used for research purposes in space research, astronomy, optics, materials science and electronic devices
Electrical and Scientific Apparatus