75132132
Jul 10, 1996
Jan 19, 1999
advanced plasma and vacuum systems comprised of power supplies, computer controls, shutter solenoids, flow controllers, pressure controllers, rate monitors, vacuum pumps, valves, gauges, switches, vacuum chambers, carrousels, system interlocks, and deposition machines for applying coatings, used for research purposes in space research, astronomy, optics, materials science and electronic devices
Electrical and Scientific Apparatus