74343623
Dec 28, 1992
manufacturing machines for thin film processing in the production of thin film transistors and other electronic products, and parts and accessories thereof; and manufacturing machines for liquid crystal displays for use in electronic products, and parts thereof
Machinerysemiconductor wafer processing equipment; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, support frames, and parts thereof
Electrical and Scientific Apparatus