78847536
Mar 28, 2006
Aug 24, 2010
Semiconductor wafer processing equipment and components therefor, namely, deposition processing equipment, etch processing equipment, electrochemical plating equipment, rapid thermal processing equipment, and chemical mechanical polishers, supporting frames therefor, and parts therefore all sold together as a unit; vacuum reaction processing equipment and components therefor sold as a unit, namely, liquid crystal display processing equipment, flat panel display processing equipment, vacuum plating equipment and optical coating equipment, supporting frames therefor, and parts therefore all sold together as a unit
Machinery