75798479
Sep 8, 1999
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, OPERATIONAL SOFTWARE, AND COMPONENTS, NAMELY, EPITAXIAL REACTORS, CHEMICAL VAPOR DEPOSITION REACTORS, PHYSICAL VAPOR DEPOSITION REACTORS, PLASMA ETCHERS, ION IMPLANTERS, AND CHEMICAL MECHANICAL POLISHERS; ALL FOR THE PROCESSING AND PRODUCTION OF SEMICONDUCTOR SUBSTRATES, THIN FILMS, SILICON DISCS AND WAFERS
Electrical and Scientific Apparatus