AILITHO

Computer software for use in semiconductor manufacturing, namely, software for displaying customizable dashboards as local web applications for lithography engineers and operators; software for collecting, analyzing, and visualizing lithography process data; software featuring artificial intelligence for anomaly detection, prioritization, and automated analysis of semiconductor fabrication data; software enabling unattended drilldown on high-priority anomalies and providing analysis results; software for ad-hoc analysis via graphical user interfaces and conversational user interfaces based on large language models