AIGIS

Work loading and unloading handling robots for metalworking machine tools; wafer transfer robots for semiconductor manufacturing machines and systems; robots for transferring glass substrates for liquid crystal; cutting machines for metalworking; cargo handling machines and apparatus; microwave generators used for semiconductor manufacturing machines and systems; Semiconductor manufacturing machines; wafer aligners for placing semiconductor wafers in desired position during processing of the semiconductor wafers

Power supply units used for semiconductor manufacturing machines and systems; Matching units that transmit power from a power source to a plasma process chamber, namely, impedance conversion electrical circuits for radio frequency power used for semiconductor manufacturing machines and systems; Semiconductor manufacturing machines and systems, comprised of radio frequency electrical power source units, radio frequency electrical controls and radio frequency electrical circuits for application in manufacturing and controlling processes in the manufacture of thin films and semiconductors