73015730
Mar 12, 1974
Jan 13, 1976
PARTICLE ACCELERATORS AND RELATED ACCESSORY EQUIPMENT-NAMELY, DRIFT TUBES, ELECTROSTATIC QUADRUPOLES, CONTROLLABLE SLIT ASSEMBLIES, ANALYZING AND SWITCHING MAGNETS, ELECTROSTATIC X-Y BEAM SCANNING SYSTEMS, PORTABLE AND NON-PORTABLE NEUTRON GENERATOR SYSTEMS, ION IMPLANTATION SYSTEMS, ACCELERATOR SYSTEMS, ELECTRON ACCELERATORS, BEAM PROFILE MONITORS, WAFER PROCESSING CHAMBERS, TARGET CHAMBERS, AND ION SOURCES
Electrical and Scientific Apparatus