86270017
May 2, 2014
Structural parts and replacement parts of mechanical vacuum coating installations in the nature of machines for cathode sputtering in the reactive and metallic mode, namely, cathodes and vacuum chambers; and, electrical machines for carrying out a sputter process which uses cathode sputtering to apply coating and layers of coating consisting of metals, metal-oxides, metal-nitrides, metal-carbides and metallic alloys
MachineryParts of mechanical vacuum coating installations in the nature of devices for cathode sputtering in the reactive and metallic mode, namely, cathodes and vacuum chambers
Electrical and Scientific Apparatus