ADVANTAG

Semiconductor manufacturing automation and communication software used to track, identify, manage, control and route lots, carriers, SMIF-Pods, operators, reticles and probe cards in the manufacture of semiconductor wafers, flat panel displays, and magnetic media; semiconductor manufacturing automation and communication device comprising sensors used to track, identify, manage, control and route lots, carriers, SMIF-Pods, operators, reticles and probe cards, an input device, a display, and a microcomputer, all for use in the manufacture of semiconductor wafers, flat panel displays, and magnetic media