76178671
Dec 11, 2000
Microsystems comprising-- micromachined devices for sensing conditions or events, actuating other systems and devices, and spraying fluids; micro electromechanical systems composed of micromachined devices for sensing conditions or events, actuating other systems and devices, or spraying fluids, and packaging; and microstructures; namely, sensors, actuators, transducers, pressure sensors, spray atomizers, and polymeric, ceramic, metallic, plastic and glass packaging for sensors, actuators and transducers
Electrical and Scientific Apparatuscustom manufacturing of microsystems comprising micromachined devices for sensing conditions or events, actuating other systems or devices, and spraying fluids; micro electromechanical systems composed of micromachined devices, and packaging; and microstructures; namely, sensors, actuators, transducers, pressure sensors, spray atomizers, and polymeric, ceramic, metallic, plastic and glass packaging for actuators and transducers
Treatment of Materialscomputer modeling, namely finite element analysis; design of microsystems comprising micromachined devices for sensing conditions or events, actuating other systems or devices, and spraying fluids; micro electromechanical systems composed of micromachined devices and packaging; and microstructures; namely, sensors, actuators, transducers, pressure sensors, spray atomizers, and polymeric, ceramic, metallic, plastic and glass packaging for actuators and transducers
Computer and Scientific