79350283
Jul 21, 2022
Mar 26, 2024
Active Trademark
Semiconductor photomask optical inspection apparatus; semiconductor reticle optical inspection apparatus; semiconductor photomask pattern optical inspection apparatus; semiconductor photomask pattern measuring apparatus, namely, optical measurement system comprised of optical inspection apparatus for detection, measurement and cleaning of foreign matter and defects on semiconductor photomask pattern; semiconductor reticle pattern optical inspection apparatus; semiconductor reticle pattern measuring apparatus, namely, optical measurement system comprised of optical inspection apparatus for detection, measurement and cleaning of foreign matter and defects on semiconductor reticle pattern
Electrical and Scientific Apparatus