73256795
Apr 7, 1980
Sep 1, 1981
Diffusion Furnace Gas System Comprising Gas Flow Controllers and Timers, Manual and Automatic Load Doors, Vacuum Pumps, Vacuum Manifolds, Water-Cooled Baffle Traps, Stainless Steel Mesh Traps, Oil Filtrators, Silicon Wafer Transfer Tubes, Silicon Wafer Boats, and Thermo-Couple Housings, for Use in Processes for the Chemical Vapor Deposition of Films on Silicon Wafers
Electrical and Scientific Apparatus