76689653
May 15, 2008
Jun 9, 2009
EQUIPMENT, NAMELY, ELLIPSOMETER BASED APPARATUS FOR INVESTIGATING LARGE SAMPLES AT MANY LOCATIONS THEREON RESULTING IN DATA WHICH CAN BE ANALYZED TO DETERMINE PHYSICAL AND OPTICAL PROPERTIES OF THE SAMPLE SUBSTRATE AND ANY PRESENT THIN FILMS, INCLUDING MULTIPLE LAYER THIN FILMS AND COATINGS
Electrical and Scientific Apparatus