Semiconductor manufacturing machines and their parts and fittings; semiconductor devices manufacturing equipment; platform for semiconductor devices manufacturing equipment; semiconductor wafer processing equipment; platform for semiconductor wafer processing equipment; semiconductor wafer conveying machines; thin-film deposition equipment for semiconductor, metal and insulator; platform for thin-film deposition equipment for semiconductor, metal and insulator; heat treatment equipment being annealing equipment for semiconductor manufacturing; platform for heat treatment equipment being annealing equipment for semiconductor manufacturing; sputtering equipment for semiconductor manufacturing; vacuum thin-film deposition equipment; vacuum vapor deposition equipment for semiconductor manufacturing; Chemical Vapor Deposition (CVD) equipment for semiconductor manufacturing; thin-film deposition equipment by Chemical Vapor Deposition method for semiconductor manufacturing; Atomic Layer Deposition (ALD) equipment for semiconductor manufacturing; etching equipment for semiconductor manufacturing