Machines for coating goods of metal, ceramic, plastic and glass, in particular by means of physical vapour deposition, chemical vapour deposition or a combination of physical vapour deposition and chemical vapour deposition; sputtering machines with integrated vacuum pumps and power supplies; magnetron sputtering machines; arc coating machines; machine parts, namely, sputtering sources; machine parts, namely, magnetron sputtering sources and targets of metal and/or ceramics for magnetron sputtering sources; machine parts, namely, arc sources and targets of metal and/or ceramics for arc sources; vacuum generation machines with integrated plasma sources for use in PVD and CVD coating, and structural parts for all the foregoing machines; treatment chambers for physical coating devices and/or chemical coating devices, namely, vacuum chambers

Coating metals and plastics to coat and to improve wear behavior; metal tempering