75832482
Oct 27, 1999
Nov 12, 2002
COMPONENTS MANUFACTURED FROM METAL AND CERAMIC COMPOSITE MATERIALS, NAMELY MOTION CONTROL ASSEMBLIES, PLATES, BEAMS, FRAMES, HOUSINGS AND STAGES, FOR USE IN THE MANUFACTURE OF SEMICONDUCTOR CAPITAL EQUIPMENT, FLAT PANEL DISPLAYS, ROBOTIC INDUSTRIAL DEVICES, AND PRECISION MOTOR CONTROL AND OPTICAL DEVICES
Electrical and Scientific Apparatus