Serial Number

75822158

Filing Date

Oct 13, 1999

Registration Date

Jan 29, 2002

Trademark by

FEI COMPANY

Classification Information

HIGH BRIGHTNESS, SUBMICRON ION AND ELECTRON BEAM COLUMNS USING FIELD EMISSION TECHNOLOGY; NAMELY, FOCUSED ION BEAM COLUMNS FOR ION LITHOGRAPHY, ION BEAM MILLING, SECONDARY ION MASS SPECTROSCOPY AND MASK REPAIR; FOCUSED ELECTRON BEAM COLUMNS FOR ELECTRON BEAM LITHOGRAPHY AND ELECTRON BEAM MICROSCOPY; SINGLE CRYSTAL SOURCE MATERIALS; NAMELY, REFRACTORY METALS, LaB, MINI-VOGEL MOUNT CATHODES, CeB, MINI-VOGEL MOUNT CATHODES, CONTROL GRID ELECTRODES, NAMELY, REBUILT WEHNELT, COLD FIELD EMITTERS, SCHOTTKY EMITTERS, AND LIQUID METAL ION SOURCES

Electrical and Scientific Apparatus