HIGH BRIGHTNESS, SUBMICRON ION AND ELECTRON BEAM COLUMNS USING FIELD EMISSION TECHNOLOGY; NAMELY, FOCUSED ION BEAM COLUMNS FOR ION LITHOGRAPHY, ION BEAM MILLING, SECONDARY ION MASS SPECTROSCOPY AND MASK REPAIR; FOCUSED ELECTRON BEAM COLUMNS FOR ELECTRON BEAM LITHOGRAPHY AND ELECTRON BEAM MICROSCOPY; SINGLE CRYSTAL SOURCE MATERIALS; NAMELY, REFRACTORY METALS, LaB, MINI-VOGEL MOUNT CATHODES, CeB, MINI-VOGEL MOUNT CATHODES, CONTROL GRID ELECTRODES, NAMELY, REBUILT WEHNELT, COLD FIELD EMITTERS, SCHOTTKY EMITTERS, AND LIQUID METAL ION SOURCES
Electrical and Scientific Apparatus