75401701
Dec 8, 1997
Dec 5, 2000
Machine parts and vacuum components used in physical vapor deposition machines used in the thin-film industry, namely, inserts, shunts, pallet wafers, anode magnet covers, carriers, clamps, flanges, nozzles, screws, shut off pins, stamper cleaners, turbo screens, turntables, vacuum chambers and weldments; machine parts and vacuum componets used in physical vapor deposition machines used in the thin-film industry, namely, backing plates, targets, cathodes, deposition shields, coils, cooling plates, cooling posts, cooling rings, crucibles, feedthroughs, foils, masks, housings, dark space shields, pole pieces, susceptors, thermal plates, thermocouplers, upper electrodes and sputtering magnetrons
Machinery