73105936
Nov 5, 1976
Jan 31, 1978
ULTRA HIGH PURITY MATERIALS FOR USE IN THE SEMICONDUCTOR INDUSTRY-NAMELY, BORON TRIBROMIDE, PHOSPHOROUS OXYCHLORIDE, PHOSPHOROUS TRIBROMIDE SILICONE TETRABROMIDE, ARSENIC TRICHLORIDE, ARSENIC TRIBROMIDE, AND ANTIMONY PENTACHLORIDE
Chemicals