Mark Identification

200 APS

Serial Number

75550399

Filing Date

Sep 10, 1998

Trademark by

SILICON VALLEY GROUP INC.

Classification Information

Automated photo processing systems for the manufacture of semiconductor devices (chips); wafer index stations; stepper interface modules; and photo resist processors, namely hot plate ovens for heating a silicon wafer, chill plates for cooling a silicon wafer, photo resist coaters, and photo resist developers

Electrical and Scientific Apparatus