Owner
STEAG MICROTECH GMBH
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Owner
STEAG MICROTECH GMBH
Nov 12, 2002
Owner
STEAG MICROTECH GMBH
Apr 4, 2000
Owner
STEAG MICROTECH GMBH
May 30, 2000
Owner
STEAG MICROTECH GMBH
Apr 21, 1998
Owner
STEAG MICROTECH GMBH
Apr 29, 1997
Owner
STEAG MICROTECH GMBH
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