P4 TECHNOLOGY

Machinery

Owner

SEMITOOL, INC.

P4 TECHNOLOGY

Machinery

Owner

SEMITOOL, INC.

PARAGON

Machinery

Owner

SEMITOOL, INC.

Jun 11, 2002
LT-308

Machinery

Owner

SEMITOOL, INC.

Jul 3, 2001
STAR

Machinery

Owner

SEMITOOL, INC.

HYDRO3

Machinery

Owner

SEMITOOL, INC.

LT-210C

Machinery

Owner

SEMITOOL, INC.

Nov 21, 2000
AQUAZONE

Machinery

Owner

SEMITOOL, INC.

MILLENNIUM

Machinery

Owner

SEMITOOL, INC.

Jun 6, 2000
SOP

Machinery

Owner

SEMITOOL, INC.

3000 MAGNUM

Machinery

Owner

SEMITOOL, INC.

Oct 12, 1999
MAGNUM

Machinery

Owner

SEMITOOL, INC.

Nov 23, 1999
ECD TECHNOLOGY

Machinery

Owner

SEMITOOL, INC.

Dec 12, 2000
ECD

Machinery

Owner

SEMITOOL, INC.

LT-210

Machinery

Owner

SEMITOOL, INC.

Oct 19, 1999
SEMITOOL

Environmental Control Apparatus

Owner

SEMITOOL, INC.

Oct 14, 1997

Machinery

Owner

SEMITOOL, INC.

Oct 7, 1997
EXPRESS

Environmental Control Apparatus

Owner

SEMITOOL, INC.

Sep 2, 1997
CENTURIUM

Machinery

Owner

SEMITOOL, INC.

Sep 24, 1996
MAGNUM

Machinery

Owner

SEMITOOL, INC.

Apr 30, 1996
CENTENNIAL

Machinery

Owner

SEMITOOL, INC.

FREEDOM

Machinery

Owner

SEMITOOL, INC.

SYMPHONY

Machinery

Owner

SEMITOOL, INC.