Owner: SEMICONDUCTOR EQUIPMENT TECHNOLOGY INC.

Building Construction and Repair and 2 other

Owner

SEMICONDUCTOR EQUIPMENT TECHNOLOGY, INC.

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Machinery

Owner

SEMICONDUCTOR EQUIPMENT TECHNOLOGY, INC.

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Electrical and Scientific Apparatus

Owner

SEMICONDUCTOR EQUIPMENT TECHNOLOGY, INC.

Nov 25, 1997

Electrical and Scientific Apparatus

Owner

SEMICONDUCTOR EQUIPMENT TECHNOLOGY, INC.

Dec 9, 1997