Computer and Scientific

Owner

PRI AUTOMATION, INC.

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

EQONNECTOR

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

STARCON

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

STARBOT

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

TSP TOTAL SERVICE PARTNERSHIP

Computer and Scientific

Owner

PRI AUTOMATION, INC.

E-VOLUTION

Education and Entertainment

Owner

PRI AUTOMATION, INC.

Dec 31, 2002
THE WAFER FLOW COMPANY

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

THE WAFER FLOW COMPANY

Computer and Scientific

Owner

PRI AUTOMATION, INC.