Computer and Scientific

Owner

PRI AUTOMATION, INC.

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Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

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EQONNECTOR

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

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STARCON

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

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STARBOT

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

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TSP TOTAL SERVICE PARTNERSHIP

Computer and Scientific

Owner

PRI AUTOMATION, INC.

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E-VOLUTION

Education and Entertainment

Owner

PRI AUTOMATION, INC.

Dec 31, 2002
THE WAFER FLOW COMPANY

Electrical and Scientific Apparatus

Owner

PRI AUTOMATION, INC.

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THE WAFER FLOW COMPANY

Computer and Scientific

Owner

PRI AUTOMATION, INC.

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