Environmental Control Apparatus

Owner

LEYBOLD VACUUM PRODUCTS, INC.

—

Electrical and Scientific Apparatus

Owner

LEYBOLD VACUUM PRODUCTS INC.

Nov 25, 1997

Electrical and Scientific Apparatus

Owner

LEYBOLD VACUUM PRODUCTS INC.

Jun 23, 1998

Machinery

Owner

LEYBOLD VACUUM PRODUCTS, INC.

Jul 7, 1992

Machinery

Owner

LEYBOLD VACUUM PRODUCTS, INC.

Sep 17, 1991