Machinery and 2 other

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

IPEC WESTECH

Machinery

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

IPEC WESTECH

Machinery

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

VIRTUAL SITE

Computer and Scientific

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

VIRTUAL BETA SITE

Computer and Scientific

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

IPEC

Machinery

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

VIRTUAL ALPHA SITE

Computer and Scientific

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

AVANTI

Machinery

Owner

INTEGRATED PROCESS EQUIPMENT CORP.

Aug 20, 1996