Machinery

Owner

FSI INTERNATIONAL, INC.

Nov 23, 2004

Machinery

Owner

FSI INTERNATIONAL, INC.

Jan 27, 2004

Machinery

Owner

FSI INTERNATIONAL, INC.

Sep 20, 2005

Machinery

Owner

FSI INTERNATIONAL, INC.

May 29, 2001

Machinery

Owner

FSI INTERNATIONAL, INC.

—

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

—

Machinery

Owner

FSI INTERNATIONAL, INC.

—

Machinery

Owner

FSI INTERNATIONAL, INC.

Sep 12, 2000
ARIES

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Jul 28, 1998
ICE

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

—
HEPASPHERE

Environmental Control Apparatus

Owner

FSI INTERNATIONAL, INC.

—
ORION

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Jan 21, 1997
PHOENIX

Machinery

Owner

FSI INTERNATIONAL, INC.

Oct 7, 1986
SATURN

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Dec 10, 1985
ZEUS

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Dec 10, 1985
NEPTUNE

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Nov 26, 1985
PROTEUS

Environmental Control Apparatus

Owner

FSI INTERNATIONAL, INC.

Jan 7, 1986
ATLAS

Electrical and Scientific Apparatus

Owner

FSI INTERNATIONAL, INC.

Nov 26, 1985