FACILI TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jul 9, 2002
FACILI TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jun 19, 2001

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jan 21, 1997
MEGATORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jul 1, 1997
MONO TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jul 15, 1997
MONOTORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Sep 30, 1997
MICRO TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Mar 5, 1996
MICROTORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Jul 1, 1997
MICRO TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Apr 1, 1997
REZOL

Chemicals

Owner

ENTEGRIS GP, INC.

Oct 3, 1995
MONO TORR

Environmental Control Apparatus

Owner

ENTEGRIS GP, INC.

Dec 7, 1993
MEGA TORR

Electrical and Scientific Apparatus

Owner

ENTEGRIS GP, INC.

May 25, 1993